Sink8
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- What is the purpose of pirahna clean and how long is one cleaning cycle supposed to be?
- Piranha is an oxidant that removes most contaminants, 10min
- When is it acceptable to clean wafers at sink8 that still have photoresist on them?
- Never. Always remove PR before using sink8
- Are users allowed to change the temperature on the piranha bath? What is the setpoint?
- No and 120degC
- What does it mean when the OVER TEMP button for the Piranha clean is lit up? What should you do?
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Piranha bath is overheating
Turn off heater and report immediately on FAULTS - What steps must you follow to dispose of empty chemical bottles.
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Take them to the wet lab (582A)
Rinse the bottle using the bottle washer machine
Using a marking pen, X out the labels
Dispose of it in the proper receptacle -
What safety gear must be worn on your hands at Sink8?
- Nitrile gloves, chem gloves AND poly gloves over chem gloves (never handle cassettes without Poly gloves).
- What safety gear must be worn on the rest of your body when working at Sink 8
- Standard Microlab garb: Booties, Bunny Suit, Bouffant Cap, Safety Glasses. In addition: Apron, Face Shield
- What should you immediately do if you break a wafer in piranha bath? Where is the necessary tool kept?
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Try to remove the pieces with 10" fluoroware tweezers.
The tweezers are located on the worktable next to the sink - What should you do if you cannot remove the broken wafer with the tweezers?
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1. Turn off the heater and let it cool below 100degC
2. Drain, rinse with DI water and drain again.
3. Remove the pieces, rinse with DI water and drain again.
4. Refill with sulphuric acid
5. Turn the heater back on
6. Report on FAULTS - What do you have to do to move wafers from piranha to HF? What happens if you dont do this?
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Run QDR until resistivity >10MOhm-cm before HF dip.
Otherwise HF gets contaminated - Are metal tweezers allowed at sink8?
- No
- What do you do if you find particles on your wafer after cleaning and drying?
- Report the problem on FAULTS
- How do you load a cassette in the spin dryer? What are you wearing on your hands?
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H-bar facing in
Clean polygloves over nitrile gloves - When do you remove wafers from the dryer?
- When the resistivity is greater than 12MOhm-cm
- Where are the cassettes stored?
- Blue bin on the worktable next to sink8
- Which chemical is added to which when making piranha?
- Always add the hydrogen peroxide to the sulphuric acid
- What do you do if the deck hose is leaking?
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Put on complete safety gear
Locate quick connect fittings at end of black curly cord and disconnect deck hose from its base
Report problem on FAULTS
Set deck hose at rear of sink deck for replacement -
What is the meaning of the following error messages from the spin rinse dryer?
1.Help-1
2.Help-3 -
1. Bladder pressure (not enough pressure to inflate door seal)
2. Door open (door not completely closed) - How do you turn on the gooseneck DI-water?
- Turn the black knob
- What do you do if you see someone leave an empty chemical bottle
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Inform them of the nanolab policies.
If necessary, dispose of the bottle yourself. - After you remove the wafer from a bath you see a ring around the bath. What does this mean? What should you do?
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The bath is contaminated.
Notify the staff and report it on FAULTS. - After placing your wafers in the Piranha bath you notice that there is brown scum floating on the surface. Have you contaminated the bath? What should you do with your wafers before taking them back to sink5 for more thorough photoresist removal?
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Yes, the bath has been contaminated
Rinse wafers with deck hose and dry with N2-gun - If you see scum floating on the surface of the bath, what do you do?
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1. Turn off the heater and let bath cool below 100degC
2. Drain bath
3. Rinse tank
4. Do not refill (bath will need RCA clean)
5. Report on FAULTS - What do you do if you notice that the cassette you just immersed is contaminated?
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1. Take the cassette out, rinse with a deck hose and place it in the bin labeled "Contaminated cassettes"
2. Report on FAULTS that sink is contaminated - What happens if the cassette is incorrectly loaded in the SRD?
- Cassette becomes unbalanced and wafers might break
- What three things do you do if a wafer breaks in the SRD?
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1. Remove pieces
2. Notify staff
3. Report on FAULTS - What two situations most likely cause Piranha to overheat? What should you do?
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Heater or thermocouple malfunction
Turn off heater, report on FAULTS - What part of the sink works regardless of whether the machine is enabled or not? Why?
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The deckhose will still work.
It is a safety feature for chemical exposure. - What does it mean when you hear a hissing noise when opening the SRD chamber?
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Nitrogen purger of the chamber is still flowing.
Wait a few seconds and the nitrogen will stop.